0200-01463 / SHADOW RING, QUARTZ, 63RA, 200MM EM / APPLIED MATERIALS AMATApplied Materials 0200-01463 Shadow Ring QTZ 63RA 200LMAAMAT 0200-01463 SHADOW RING, QUARTZ, 200MM,63RA EMAX, 129342AMAT 0200-01463 SHADOW RING, QUARTZ, 200MM,63RA EMAX, 119404SHADOW RING,QUARTZ, 63RA, 200 EMAX 0200-014630200-01463 / SHADOW RING, QUARTZ, 63RA, 200MM EM / APPLIED MATERIALS AMAT0200-01463 / SHADOW RING, QUARTZ, 63RA, 200MM EM  / APPLIED MATERIALS AMAT0200-01463 / SHADOW RING, QUARTZ, 63RA, 200MM EM  / APPLIED MATERIALS AMAT0200-01463 / RING SHADOW QUARTZ, WEST COAST QUARTZ 96368 / APPLIED MATERIALS SHADOW RING,QUARTZ, 63RA, 200 EMAX 0200-014630200-01463, APPLIED MATERIALS, SHADOW RING, QUARTZ, 63RA, 200 EMAX0200-01463  /RING SHADOW QUARTZ / APPLIED MATERIALS
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APPLIED MATERIALS 0200-01463

Quartz Shadow Ring

Market Availability & Pricing

Part number0200-01463
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales900 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Ceramic & Quartz Parts
Quartz Shadow Ring
APPLIED MATERIALS0200-01463Quartz shadow ring
Product description
Quartz shadow ring for 200 mm process hardware; evidence includes 63RA and EMAX wording.
Specifications and identifiers
provided characteristics
Materialquartz
Wafer size context200 mm
Surface/finish wording63RA
Likely a surface finish notation; verify against print.
Associated wordingEMAX / 200LMA
Platform/process context is not fully resolved.
Applications
CVD/PVD process chambersshadow rings and covers200 mm wafer process hardwarewafer edge shadowingplasma/process chamber shielding200 mm process hardware
How it works

A quartz chamber component is a high-purity process part used near plasma, heat, or reactive gases.

Quartz parts are chosen for cleanliness, heat resistance, and process compatibility; small geometry changes can affect plasma and wafer uniformity.

Technical guide
quartz

High-purity silicon dioxide material commonly used for clean, high-temperature chamber parts.

QTZ
Quartz
What to verify before purchase
  • Confirm actual dimensions, surface finish, revision, and whether EMAX/200LMA applies to the target chamber.
  • Inspect for chips, clouding, deposits, or prior cleaning damage.
Confirm with the seller
  • Exact chamber model and detailed drawing specifications are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0200-01463 / SHADOW RING, QUARTZ, 63RA, 200MM EM / APPLIED MATERIALS AMAT

0200-01463 / SHADOW RING, QUARTZ, 63RA, 200MM EM / APPLIED MATERIALS AMAT

USD 815.6800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 11, 2026 20:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:28 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0200-01463 Shadow Ring QTZ 63RA 200LMA

Applied Materials 0200-01463 Shadow Ring QTZ 63RA 200LMA

USD 799.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jun 1, 2026 04:45 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:30 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0200-01463 SHADOW RING, QUARTZ, 200MM,63RA EMAX, 129342

AMAT 0200-01463 SHADOW RING, QUARTZ, 200MM,63RA EMAX, 129342

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 28, 2023 20:00 UTC
End recorded: Dec 7, 2024 02:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0200-01463 SHADOW RING, QUARTZ, 200MM,63RA EMAX, 119404

AMAT 0200-01463 SHADOW RING, QUARTZ, 200MM,63RA EMAX, 119404

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jun 15, 2023 19:30 UTC
End recorded: Dec 7, 2024 04:09 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
SHADOW RING,QUARTZ, 63RA, 200 EMAX 0200-01463

SHADOW RING,QUARTZ, 63RA, 200 EMAX 0200-01463

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jun 12, 2023 06:30 UTC
End recorded: Dec 7, 2024 03:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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