Product description
Applied Materials 0200-01904 ceramic pedestal alignment pin for 300 mm PCI/PCII context.
Specifications and identifiers
identification
| Description | Pedestal alignment pin |
|---|
| Material | Ceramic |
|---|
| Nominal size/context | 300 mm PCI/PCII |
|---|
Applications
PVD/CVD chamber kitsESC and cathode stacksprocess chamber liner and shield replacementPedestal alignment300 mm chamber hardware replacementCeramic alignment pin service
How it works
A process-facing ring, liner, shield, or ceramic/quartz chamber component used around the wafer or chamber opening.
Geometry, material, surface condition, and cleanliness affect process uniformity, plasma behavior, particle risk, and fit.
Technical guide
alumina
ceramic material used where electrical insulation and plasma compatibility are needed
aluminum
common chamber hardware material when compatible with the process
quartz
high-purity silica glass used for plasma-facing or high-temperature parts
- ESC
- electrostatic chuck
- PVD
- physical vapor deposition
What to verify before purchase
- Verify pin dimensions and ceramic grade
- Inspect for chips or cracks
- Confirm PCI/PCII pedestal compatibility
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.