Product description
Nozzle insert, Y203/Yttria ceramic, solid/thick, DPS G5 context
Specifications and identifiers
identification
| Item type | Nozzle insert Insert component used in a nozzle or gas distribution feature. |
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| Material | Y203 / Yttria ceramic Y203 likely refers to yttria/Y2O3 ceramic; exact material spec should be verified. |
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| Configuration | DG solid thick / DPS G5 Preserved configuration/platform wording from descriptions. |
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Equipment context
- Applied Materials DPS G5 equipment
Applications
CVD chambersetch chambersplasma-facing hardwaregas distribution areasplasma-facing ceramic insertnozzle service replacementDPS/G5 chamber hardware maintenance
How it works
A yttria ceramic nozzle insert used inside or near a semiconductor process chamber.
Ceramic geometry, material grade, surface finish, and process compatibility affect plasma behavior, particle generation, and fit.
Technical guide
ceramic
Exact ceramic composition should be verified; similar-looking parts can use different materials.
quartz
Quartz is used where high purity, thermal stability, and chemical resistance are needed.
yttria
Yttria-based ceramics are used in some plasma environments because of their resistance to aggressive plasma chemistries.
CVD
Chemical vapor deposition equipment deposits thin films on wafers.
HDPCVD
High-density plasma CVD uses plasma to assist film deposition, often with specialized chamber ceramics.
- DPS
- Decoupled Plasma Source, an Applied Materials platform/family term in many part descriptions.
- HDPCVD
- High-density plasma chemical vapor deposition.
- SACVD
- Sub-atmospheric chemical vapor deposition.
What to verify before purchase
- Verify Y203/Y2O3 material grade and spelling.
- Confirm DPS G5 chamber compatibility and exact geometry.
- Inspect for chips, erosion, and contamination.
Confirm with the seller
- Exact dimensions
- ceramic grade
- full tool compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.