AMAT Applied Materials 0200-09105 Rev01 Liner Ceramic APF Bottom Middle RightAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - NewAMAT Applied Materials 0200-09105 Liner Ceramic, APF - UsedAMAT Applied Materials 0200-09105 Liner Ceramic, APF  - New
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APPLIED MATERIALS 0200-09105

Ceramic APF Liner

Market Availability & Pricing

Part number0200-09105
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales700 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
Ceramic APF Liner
APPLIED MATERIALS0200-09105Ceramic chamber liner
Product description
Ceramic APF liner, with bottom/middle/right position context in one description.
Specifications and identifiers
identification
ItemCeramic liner
Process-facing liner for chamber protection/geometry.
Platform/process contextAPF
Repeated context in the item description.
Position referenceBottom middle right
Specific position text is referenced in one description; verify exact installed location.
Applications
CVD and HDP-CVD chambersetch process modulesCMP head and wafer support assembliesAPF chamber liner replacementceramic process chamber protective liner
How it works

A chamber consumable or process-facing component sits in or near the process environment and influences gas flow, plasma boundary conditions, shielding, or wafer support.

Material, coating, dimensions, and surface condition can affect particles, deposition/etch uniformity, and chamber matching.

Technical guide
CVD
Chemical vapor deposition.
HDP-CVD
High-density plasma chemical vapor deposition.
TEOS
Tetraethyl orthosilicate, a common silicon-oxide precursor.
What to verify before purchase
  • Verify position/orientation and revision.
  • Inspect ceramic for chips, cracks, erosion, or contamination.
Confirm with the seller
  • Exact APF chamber variant and material grade.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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