Product description
Applied Materials 0200-09135 150 mm pumping plate adapter / center adapter, also described in one source as plumbing plate adapter.
Specifications and identifiers
identification
| Description | Adapter, pumping plate |
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| Nominal size | 150 mm |
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| Position/context | Center adapter appears in evidence |
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| Alternate wording | Plumbing plate appears in one source; verify exact naming |
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Applications
CVD/etch chamber hardwaregas distributionpumping/exhaust paths150 mm pumping plate interfaceCVD chamber hardwareChamber adapter replacement
How it works
A machined chamber plate used as part of a process chamber, pumping path, or gas distribution region.
Hole pattern, surface condition, flatness, and material determine fit and process behavior.
Technical guide
- pumping plate
- plate associated with chamber exhaust or pumping conductance
What to verify before purchase
- Verify whether the correct label is pumping plate or plumbing plate for the tool
- Confirm size and bolt/hole pattern
- Inspect sealing surfaces and cleanliness
Confirm with the seller
- Exact chamber and material are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.