Product description
Applied Materials 0200-09217 8 inch quartz ring for extended cathode / metal-notched context.
Specifications and identifiers
identification
| Description | Quartz ring, extended cathode, metal notched |
|---|
| Nominal size | 8 inch / 200 mm class |
|---|
| Supplier context | XYCARB and Enoch Engineering names appear in related part data |
|---|
Applications
PVD/CVD chamber kitsESC and cathode stacksprocess chamber liner and shield replacementExtended cathode ring replacementPVD chamber quartz hardwareProcess-facing ring service
How it works
A process-facing ring, liner, shield, or ceramic/quartz chamber component used around the wafer or chamber opening.
Geometry, material, surface condition, and cleanliness affect process uniformity, plasma behavior, particle risk, and fit.
Technical guide
alumina
ceramic material used where electrical insulation and plasma compatibility are needed
aluminum
common chamber hardware material when compatible with the process
quartz
high-purity silica glass used for plasma-facing or high-temperature parts
- ESC
- electrostatic chuck
- PVD
- physical vapor deposition
What to verify before purchase
- Verify notch geometry and exact ring dimensions
- Inspect quartz for cracks, chips, and process erosion
- Confirm material and supplier requirements
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.