Product description
External quartz ring, 8 in / 200 mm context, referenced as AMAT 0200-09222.
Specifications and identifiers
Identifying details
| Item noun | External quartz ring The part identity uses ring/external quartz wording. |
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| Size | 8 in / 200 mm context The part identity includes both 8 inch and 200 mm style wording. |
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| Material | Quartz Specified as QTZ/quartz in the part identity. |
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| Vendor context | Xycarb Ceramics Xycarb appears in several part descriptions. |
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Applications
etch or deposition chamber consumablesexternal or insert ringshigh-purity process-region hardwareQuartz chamber ring replacementProcess chamber consumable/insulator ring
How it works
A quartz ring is a chamber consumable or process-area ring made for high-purity, high-temperature environments.
Quartz geometry and cleanliness can affect plasma/process uniformity, particle performance, and chamber fit.
Technical guide
quartz
Quartz is high-purity silicon dioxide used where heat resistance, chemical compatibility, and low contamination are important.
- 8 inch / 200 mm
- Wafer size or chamber hardware size context; verify exact fit against tool documentation.
- QTZ
- Common abbreviation for quartz.
What to verify before purchase
- Verify diameter, notch/features, and surface condition.
- Confirm cleaned/precleaned status if required for process use.
Confirm with the seller
- Exact chamber model is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.