Product description
Applied Materials 0200-09366 graphite plug for 150 mm poly/DC bias application.
Specifications and identifiers
identification
| Material | Graphite Material callout associated with the part. |
|---|
| Application size | 150 mm Wafer or chamber size callout. |
|---|
| Function descriptor | DC / DC bias plug DC-related descriptor associated with the part. |
|---|
| Process descriptor | Poly Poly process context associated with the part. |
|---|
Applications
poly etch chambersDC bias hardware150 mm process hardware150 mm poly process chamber hardwareDC bias/chamber plug application
How it works
A graphite plug is a machined process or chamber component used where conductivity, thermal behavior, or plasma compatibility is required.
Material and geometry are important because graphite parts can affect biasing, thermal behavior, and contamination control.
Technical guide
graphite
Graphite is electrically conductive and thermally stable, but must be clean and correctly specified for semiconductor use.
- DC
- DC may refer to direct-current bias or a DC-related chamber position/function depending on the assembly.
What to verify before purchase
- Confirm dimensions, exact graphite grade, revision, and whether it is a DC bias plug or general DC plug.
Confirm with the seller
- Exact chamber model is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.