Product description
Applied Materials 0200-09432 plasma tube / 25 mm applicator tube for ASP / PRSP3 chamber-applicator context.
Specifications and identifiers
identification
| Description | Plasma tube / applicator tube |
|---|
| Reported size | 25 mm |
|---|
| Reported context | ASP / PRSP3 applicator appears in evidence |
|---|
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC and focus-ring stacksPlasma source applicator replacementASP chamber hardwareProcess tube consumable service
How it works
A shaped process-facing ring or chamber component used near a wafer, chuck, electrode, or gas path.
Geometry, material, coating, and cleanliness can affect plasma behavior, contamination risk, and fit.
Technical guide
aluminum
common lightweight chamber hardware material
ceramic
electrically insulating, process-compatible material used in chamber hardware
quartz
high-purity silica glass used in plasma or high-temperature environments
- ESC
- electrostatic chuck
What to verify before purchase
- Verify material, length, bore, and exact applicator configuration
- Inspect for chips, cracks, erosion, or contamination
- Confirm whether sold individually or in lots
Confirm with the seller
- Exact material and chamber revision are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.