AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST ASP, 145455AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST ASP, 150511AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113372AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 112947AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113082AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113081AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113080AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113079AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113078AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113145AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113143AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113144AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113313AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113312AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113311AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113310AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113309AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, ASP, 147687AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, ASP, 147688AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 158037AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 158038AMAT 0200-09445 Liner Quartz Upper Gas Distribution ASP, 0200-09445E, 121512AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113155AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113154AMAT 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3, 113153AMAT 0200-09445 Liner, Quartz Upper, Gas Distribution, PRSP3, 121414Applied Materials (AMAT) 0200-09445 0200-09445 Applied Materials (AMAT) 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP30200-09445 LINER UPPER ASP AMAT P50000200-09445 LINER UPPER ASP AMAT P5000
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APPLIED MATERIALS 0200-09445

Upper Quartz Gas Distribution Liner

Market Availability & Pricing

Part number0200-09445
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales115 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Quartz Parts
Upper Quartz Gas Distribution Liner
APPLIED MATERIALS0200-09445quartz gas distribution liner
Product description
Liner, Quartz, Upper Gas Distribution, PRSP3 / ASP context
Specifications and identifiers
provided listing evidence
MaterialQuartz / QTZ
Repeated titles state quartz.
Location/functionUpper gas distribution liner
Repeated titles identify upper gas distribution liner.
ContextPRSP3 / ASP appears
Exact chamber/application context should be verified.
source summary
Listing-title count25
Number of provided listing-title sources in this review input.
Applications
process chamberswafer supportchamber shieldinggas distributionthermal/process uniformityGas distribution liner in process chamberQuartz chamber consumable replacement
How it works

A chamber mechanical component that supports, shields, reflects, or positions wafers and process hardware.

Geometry, material, finish, cleanliness, and exact revision can affect process uniformity, particle performance, and fit.

Technical guide
aluminum

Common chamber/fixture material when stated by evidence.

quartz

Often used for high-purity, heat-tolerant chamber components when supported by evidence.

chamber shielding

Shields/liners protect chamber structures and can affect deposition/etch conditions.

wafer support

Chucks and pedestals support or locate wafers during processing.

200mm
8 inch wafer class.
300mm
12 inch wafer class.
QTZ
Quartz.
What to verify before purchase
  • Exact part number and revision on the physical label or package
  • Tool/platform compatibility before installation
  • Condition, cleanliness, calibration, and completeness for the specific offered unit
  • Any associated subassembly or cross-reference numbers before substitution
Confirm with the seller
  • OEM datasheet specifications not present in the provided evidence
  • Guaranteed compatibility beyond the listing-title evidence
  • Exact material, coating, firmware, or configuration unless explicitly stated in the listing evidence

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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