Product description
200 mm ceramic clamp ring cover with six holes for Applied Materials equipment.
Specifications and identifiers
identification
| Normalized item type | ceramic clamp ring cover |
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key attributes
| Size/context | 200 mm |
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| Feature | 6 holes; .128 hole detail appears in multiple titles |
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| Material | Ceramic |
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Applications
plasma process chambersCVD/PVD chamber kitsprocess-facing chamber consumableswafer clamping area coverceramic chamber hardwareprocess-facing cover component
How it works
A ceramic chamber component is a process-facing insulating or wear-resistant part used inside or near a semiconductor process chamber.
Ceramic geometry, cleanliness, surface condition, and matching revision can affect plasma behavior, particle control, and chamber fit.
Technical guide
ceramic
Often used where electrical insulation, heat resistance, or plasma compatibility is needed.
- liner
- A chamber part that lines or protects an internal wall or process area.
What to verify before purchase
- Confirm hole pattern, revision, ceramic type, cleaned condition, and exact chamber fit.
Confirm with the seller
- Exact tool configuration and revision compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.