Product description
Applied Materials 0200-09638 quartz cylinder, 200 mm extended cathode ceramic / quartz chamber component.
Specifications and identifiers
identification
| Description | Cylinder, quartz, 200 mm extended cathode ceramic |
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| Nominal size | 200 mm |
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| Revision note | Rev C appears in evidence |
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Applications
plasma chambersCVD/HDP-CVD hardwarewafer-area consumablesprocess-facing insulation200 mm extended-cathode chamber hardwareQuartz/ceramic process-facing replacementPlasma chamber insulation or shielding
How it works
A quartz or ceramic process-facing component used for insulation, shielding, or chamber geometry.
Quartz and ceramic parts must match geometry and cleanliness requirements because they may sit near plasma or hot process environments.
Technical guide
ceramic
electrically insulating inorganic material used in chamber hardware
quartz
high-purity silica glass with good heat and plasma resistance
What to verify before purchase
- Verify dimensions and revision
- Inspect for chips, cracks, and plasma erosion
- Confirm chamber/process compatibility
Confirm with the seller
- Exact chamber platform is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.