Product description
Ring, pedestal, ESC, 150 mm, 1-flat, WEB/HEWEB context.
Specifications and identifiers
mechanical details
| Item | Pedestal ring |
|---|
| Associated Subassembly | ESC / electrostatic chuck pedestal |
|---|
| Wafer Size | 150 mm |
|---|
| Feature | 1 flat |
|---|
| Context | WEB / HEWEB wording appears in evidence |
|---|
Applications
Electrostatic chuck assembliesEtch chamber pedestal hardware150 mm wafer process hardwareESC pedestal ring replacement150 mm chamber pedestal service
How it works
An ESC pedestal ring is a chamber component associated with the electrostatic chuck or pedestal area.
Fit, flat orientation, and surface condition are important because pedestal-area parts influence wafer support and chamber clearances.
Technical guide
ESC
Electrostatic chuck; clamps the wafer electrostatically in many process chambers.
- 1FL
- One flat.
- WEB/HEWEB
- Context code in evidence; exact expansion not confirmed.
What to verify before purchase
- Confirm 150 mm size, one-flat orientation, and exact WEB/HEWEB configuration.
- Inspect for coating wear, chips, or erosion before reuse.
Confirm with the seller
- Specific tool compatibility beyond the provided part evidence is not independently confirmed.
- Calibration or functional status is not confirmed from the part identity alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.