0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIALS AMAT0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ - AMAT, USED, REFURBISHEDApplied Materials 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ AMATAMAT Applied Materials 0200-10164 Pumping Insert Shield Manufacture RefurbishedAMAT 0200-10164 SHIELD PUMPING INSERT SIN, DXZ0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIALS AMAT0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIALS AMAT0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIALS AMAT0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIAL AMATAMAT 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ, NEWAMAT 0200-10164 Pumping insert shield SILANEAMAT 0200-10164 SHIELD PUMPING INSERT SIN, DXZAMAT 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ, NEW BT-01-01-0018
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APPLIED MATERIALS 0200-10164

SiN DXZ Pumping Insert Shield

Market Availability & Pricing

Part number0200-10164
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1700 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Ceramic & Quartz Parts
SiN DXZ Pumping Insert Shield
APPLIED MATERIALS0200-10164Pumping insert shield
Product description
Applied Materials 0200-10164 shield / pumping insert, described with SiN and DXZ context.
Specifications and identifiers
identification
DescriptionPumping insert shield
Material/process markerSiN
Context markerDXZ
Applications
process chamber kitsplasma-facing hardwarewafer-area consumablesPumping insert shield replacementProcess chamber exhaust/pumping path hardwarePlasma-facing chamber kit service
How it works

A shaped ring used in or around a process chamber, wafer support, or gas/exhaust path.

Material, diameter, flatness, and surface condition can affect fit, plasma behavior, contamination, and process uniformity.

Technical guide
SiN

Silicon nitride notation may indicate a ceramic or process/chamber context; verify actual material from the part label or drawing.

What to verify before purchase
  • Verify material and coating
  • Confirm exact DXZ chamber context and revision
  • Inspect for erosion, cracks, deposits, or refurbishment quality
Confirm with the seller
  • Exact chamber/platform compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIALS AMAT

0200-10164 / SHIELD, PUMPING INSERT, SIN, DXZ / APPLIED MATERIALS AMAT

USD 1058.7300

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 1, 2026 11:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ - AMAT, USED, REFURBISHED

0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ - AMAT, USED, REFURBISHED

USD 1250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 22, 2025 17:44 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ AMAT

Applied Materials 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ AMAT

USD 1000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Feb 4, 2025 06:33 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT Applied Materials 0200-10164 Pumping Insert Shield Manufacture Refurbished

AMAT Applied Materials 0200-10164 Pumping Insert Shield Manufacture Refurbished

USD 1109.2300

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 12, 2023 22:00 UTC
End recorded: Dec 7, 2024 08:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0200-10164 SHIELD PUMPING INSERT SIN, DXZ

AMAT 0200-10164 SHIELD PUMPING INSERT SIN, DXZ

USD 1556.95

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 24, 2022 22:00 UTC
End recorded: Dec 7, 2024 17:33 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 22, 2026 11:44 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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