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APPLIED MATERIALS 0200-10169

Ceramic DXZ Edge Cover Plate

Market Availability & Pricing

Part number0200-10169
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales549 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
Ceramic DXZ Edge Cover Plate
APPLIED MATERIALS0200-10169ceramic edge cover plate
Product description
Ceramic plate, edge cover, DXZ GECO context
Specifications and identifiers
identification
Item typeEdge cover plate
Material/contextCeramic
Platform/process contextDXZ GECO
Context terms from supported descriptions; exact chamber should be verified.
Applications
plasma chambersCVD/etch modulesthermal or process isolation areaschamber edge protectionceramic process hardware replacementDXZ edge-cover service
How it works

A ceramic or quartz chamber component used for process isolation, edge coverage, shielding, or plasma-facing protection.

Material, wafer size, thickness, and chamber position are critical because these parts can affect plasma behavior and contamination.

What to verify before purchase
  • Verify exact chamber and wafer-size fit.
  • Confirm whether this is an edge cover plate or edge-ring substitute for the target module.
Confirm with the seller
  • Exact material grade and coating are not confirmed from the supplied evidence.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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