AMAT 0200-10173 Plate Cover, 8", ALN, 118237AMAT 0200-10173 Cover, 8 Inch, Plate, ALN, Graphite, 415232AMAT 0200-10173 Cover, 8", Plate, ALN LTD Ceramics, Graphite, 106668APPLIED MATERIALS 0200-10173 8-Inch Aluminum Nitride DXZ Heater OBS Plate CoverAMAT 0200-10173 Cover, 8 Inch, Plate, ALN, Graphite, 415232AMAT 0200-10173 Cover, 8 Inch, Plate, ALN, Graphite, 415232125-0404// AMAT APPLIED 0200-10173 OBS PLATE, COVER, 8 HEATER, D NEWAPPLIED MATERIALS 0200-10173 8-Inch Aluminum Nitride DXZ Heater OBS Plate CoverApplied Materials 0200-10173 Plate, Cover 200 MM DXZ Heater  (NEW)    AMATApplied Materials 0200-10173 Plate, Cover 200 MM DXZ Heater  (NEW)    AMAT
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APPLIED MATERIALS 0200-10173

8-inch AlN heater plate cover

Market Availability & Pricing

Part number0200-10173
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1899.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Ceramic & Quartz Parts
8-inch AlN heater plate cover
APPLIED MATERIALS0200-10173heater plate cover
Product description
8-inch/200 mm aluminum nitride plate cover for a DXZ heater assembly; graphite wording appears in some evidence and should be verified.
Specifications and identifiers
supported details
Size8 inch / 200 mm
Supported by provided evidence
MaterialAluminum nitride (AlN)
Supported by multiple titles; exact construction should be verified
Associated subsystemDXZ heater / OBS plate cover
Supported but compatibility needs confirmation
Applications
Heated pedestal assembliesCVD/thermal process modulesChamber hardware rebuildsHeater cover replacementThermal process chamber maintenanceCeramic plate interface
How it works

A heater plate cover is a process-facing or protective cover associated with a heated pedestal or heater assembly.

The cover can affect thermal transfer, particle performance, and protection of the underlying heater hardware.

What to verify before purchase
  • Verify material composition and whether graphite is present
  • Confirm 8 inch/200 mm fit and revision
  • Inspect for chips, warping, coating damage, or contamination
Confirm with the seller
  • Exact DXZ chamber/tool compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0200-10173 Plate Cover, 8", ALN, 118237

AMAT 0200-10173 Plate Cover, 8", ALN, 118237

USD 4500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 25, 2023 23:30 UTC
End recorded: Dec 7, 2024 01:14 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0200-10173 Cover, 8 Inch, Plate, ALN, Graphite, 415232

AMAT 0200-10173 Cover, 8 Inch, Plate, ALN, Graphite, 415232

USD 4500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 6, 2022 18:00 UTC
End recorded: Dec 6, 2024 18:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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