Product description
Quartz collar, 200 mm, for Applied Materials chamber hardware
Specifications and identifiers
identification
| Component | Quartz collar Quartz chamber component. |
|---|
| Size reference | 200 mm Wafer/tool size context stated in evidence. |
|---|
Applications
process chamber insulationplasma shieldingquartz or ceramic consumable stacks200 mm chamber quartz hardwareprocess chamber collar replacementplasma/thermal compatible chamber component
How it works
A ceramic or quartz chamber component used as an insulator, isolator, collar, ring, or shielding element.
Material purity, geometry, surface condition, cleaning history, and process compatibility are critical in chamber environments.
Technical guide
ceramic_or_quartz
The evidence identifies ceramic/quartz-type usage; verify exact material such as quartz, alumina, or another ceramic before use.
plasma_chamber_materials
Ceramic and quartz parts are used where electrical insulation, thermal stability, or plasma compatibility is needed.
- BKM1
- Abbreviation seen in the evidence; exact meaning should be verified against OEM documentation.
- TxZ
- Tool/process-family term seen with some Applied Materials chamber components.
What to verify before purchase
- Confirm dimensions and drawing revision
- Inspect for chips, cracks, haze, or contamination
- Confirm quartz grade and cleaning status
Confirm with the seller
- Exact chamber model is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.