Product description
Applied Materials 0200-10191 200 mm common silane shield / ceramic shield.
Specifications and identifiers
identification
| Description | Common silane shield |
|---|
| Nominal size | 200 mm |
|---|
| Material | Ceramic wording present |
|---|
Applications
PVD chambersESC and wafer support stacksshield and cover-ring assembliesprocess chamber consumablesSilane process chamber shielding200 mm chamber shield replacementCVD process-area consumable
How it works
A process-facing ring or plate used around the wafer, chuck, or chamber process region.
Geometry, material, coating, and cleanliness affect fit, plasma behavior, particle risk, and process repeatability.
Technical guide
- silane
- Process gas commonly used in CVD applications
What to verify before purchase
- Verify material and coating
- Confirm cleaned condition and process compatibility
- Inspect for cracks, erosion, and deposits
Confirm with the seller
- Exact CVD chamber model is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.