Product description
Applied Materials 0200-10243 quartz shadow ring, 150 mm / 6 inch, flat configuration.
Specifications and identifiers
identification
| Description | Shadow ring |
|---|
| Material | Quartz |
|---|
| Nominal size | 150 mm / 6 inch |
|---|
| Geometry | Flat |
|---|
Applications
process chamber kitsplasma-facing hardwarewafer-area consumables150 mm chamber shadow ring replacementPlasma-facing ring serviceWafer-edge process shielding
How it works
A shaped ring used in or around a process chamber, wafer support, or gas/exhaust path.
Material, diameter, flatness, and surface condition can affect fit, plasma behavior, contamination, and process uniformity.
Technical guide
quartz
High-purity silica glass used for thermal and plasma-facing chamber parts.
What to verify before purchase
- Verify diameter, flatness, and one-sided/finish details
- Inspect for chips, cracks, erosion, or contamination
- Confirm chamber/process compatibility
Confirm with the seller
- Exact chamber platform is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.