Product description
Applied Materials 0200-18062 14 inch ID HDP-CVD ceramic chamber dome, Rev. 3 context, associated with Applied Ceramics 91-01017A in the evidence.
Specifications and identifiers
identification
| Description | Ceramic chamber dome |
|---|
| Size | 14 inch ID reported |
|---|
| Process/platform context | HDP-CVD / Ultima context |
|---|
| Associated supplier/reference | Applied Ceramics 91-01017A appears in evidence |
|---|
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC/focus/shadow ring stacksHDP-CVD chamber dome replacementCeramic process chamber hardwareUltima/14 inch ID dome service
How it works
A ring-shaped process or mechanical component used around a wafer, chuck, chamber opening, or plasma region.
Ring geometry, material, coating, and cleanliness directly affect fit, plasma behavior, and process contamination.
Technical guide
aluminum
common chamber hardware material
ceramic
electrically insulating process-compatible material
quartz
high-purity silica glass used in process chambers
- SNNF
- process/tool context abbreviation seen in the evidence; verify exact meaning for the tool
What to verify before purchase
- Inspect for cracks, chips, erosion, and contamination
- Verify revision and diameter against existing dome
- Confirm RPS/non-RPS and chamber configuration
Confirm with the seller
- Exact Ultima chamber configuration is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.