Product description
Right-side lamp cover insulator for Applied Materials lamp/heater cover hardware.
Specifications and identifiers
details
| Side | Right |
|---|
| Function | Lamp cover insulation |
|---|
identification
| Normalized item type | Lamp cover insulator |
|---|
| Supported description | Right-side lamp cover insulator for Applied Materials lamp/heater cover hardware. |
|---|
Applications
PVD/CVD/etch process chamberselectrostatic chuck assembliesdeposition shields, liners, rings, and coversThermal/electrical insulation around lamp or heater coversLamp module service
How it works
A chamber or wafer-processing hardware component used around the wafer, chamber wall, source area, or electrostatic chuck stack.
Geometry, material, coating, and wafer size strongly affect process fit, plasma exposure, and contamination control.
Technical guide
ceramic_or_metal
Many chamber parts use ceramics, aluminum, stainless steel, quartz, or coated metals depending on plasma and chemistry exposure.
ESC
Electrostatic chuck hardware clamps or supports wafers during processing.
What to verify before purchase
- Confirm right-hand orientation and matching lamp-cover assembly.
- Inspect ceramic/insulating material for chips or cracks.
Confirm with the seller
- Exact machine compatibility beyond the named platform/context is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.