Product description
Inner gas feed plug for DPS A3 / DPS Poly chamber context.
Specifications and identifiers
identified features
| Component type | Inner gas feed plug Process gas feed-related chamber hardware. |
|---|
| Platform/context clue | DPS A3 / DPS Poly Context appears in evidence. |
|---|
Equipment context
- Applied Materials DPS A3 / DPS Poly chamber
Applications
process chamber hardwarewafer handlingPVD/CVD/etch modulestool maintenancegas feed hardwareDPS chamber maintenanceprocess chamber replacement part
How it works
A mechanical chamber or tool component used as a structural, mounting, cover, liner, or process-facing part.
Mechanical dimensions, process exposure, material, coating, and revision can affect fit and process compatibility.
What to verify before purchase
- Confirm material, dimensions, revision, and exact DPS chamber variant.
- Inspect for process exposure and cleaning condition.
Confirm with the seller
- Exact material is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.