Product description
Slit window, Al2O3/alumina; sapphire wording appears in some evidence and should be verified.
Specifications and identifiers
supported identity
| Function | Slit window Repeated evidence identifies a slit window. |
|---|
| Material | Al2O3 / alumina Repeated evidence includes AL203/Al2O3 wording. |
|---|
| Alternate material wording | Sapphire Some evidence says sapphire; verify whether this is single-crystal sapphire or alumina ceramic. |
|---|
Equipment context
- Semiconductor process equipment
Applications
etch chambersCVD chambersPVD chamberswafer clampingprocess shieldingoptical/process slit window replacementchamber viewport/window serviceprocess-facing ceramic window
How it works
A wafer-contact or process-facing ring, shield, window, pedestal, clamp, or plate used near the wafer/process area.
Diameter, material, coating, cleanliness, notch orientation, and revision directly affect process fit and contamination risk.
Technical guide
evidence_scope
Only material terms supported by provided evidence should be treated as likely.
typical
quartz, ceramic, alumina, stainless steel, Vespel, aluminum, or process-specific coated metals
CVD
chemical vapor deposition
PVD
physical vapor deposition
- 200mm
- 8-inch wafer-class tooling
- 300mm
- 12-inch wafer-class tooling
What to verify before purchase
- Verify material form: Al2O3 alumina versus sapphire.
- Confirm dimensions, polish, and coating/cleanliness.
Confirm with the seller
- Exact optical grade.
- Coating or surface finish.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.