Product description
Lower quartz liner for gas-distribution area, with ground/ASP+ and Ulvac references appearing in source wording.
Specifications and identifiers
chamber
| Item form | Lower gas-distribution liner Liner used in a lower gas-distribution chamber area. |
|---|
| Material | Quartz Quartz material is repeatedly referenced. |
|---|
Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assembliesGas distribution liner replacementQuartz chamber liner service
How it works
A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.
Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.
What to verify before purchase
- Quartz condition and cleaning history
- ASP+/ground reference relevance
- Exact chamber fit
Confirm with the seller
- Exact Ulvac relationship or model
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.