West Coast Quartz 91-01627A Silicon Slab Rework AMAT 0200-40013 RefurbishedWest Coast Quartz 91-01627 Silicon Slab AMAT 0200-40013 OEM RefurbishedAMAT Applied Materials 0200-40013 Silicon Slab Rev. D New SurplusAMAT 0200-40013 SLAB, SILICON, PEDESTAL, OEM, NEWAMAT 0200-40013 SLAB, SILICON; WEST COAST QUARTZ 91-01627AAMAT 0200-40013 Slab, Silicon, pedestalAMAT 0200-40013 SLAB, SILICON, PEDESTAL, OEM, NEWAMAT 0200-40013 SLAB, SILICON, PEDESTAL, OEM, NEWAMAT 0200-40013 SLAB, SILICON, PEDESTAL, OEM, NEWAMAT 0200-40013 SLAB, SILICON, PEDESTAL, OEM, NEWAMAT 0200-40013 Rev D - Silicon Slab, OEM, NewAMAT 0200-40013 SLAB, SILICON; WEST COAST QUARTZ 91-01627AAMAT 0200-40013 SLAB, SILICON; WEST COAST QUARTZ 91-01627AAMAT 0200-40013 SLAB, SILICON; WEST COAST QUARTZ 91-01627AAPPLIED MATERIALS (AMAT) 0200-40013 WEST COAST QUARTZ 91-01627A SILICON SLAB HD
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Applied Materials 0200-40013

Silicon Pedestal Slab

Market Availability & Pricing

Part number0200-40013
ManufacturerApplied Materials
Current availabilitySee listings below
Latest completed listing with reported sales2505.21 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
Silicon Pedestal Slab
Applied Materials0200-40013Silicon slab
Product description
Silicon slab / pedestal component, associated with West Coast Quartz 91-01627 / 91-01627A context.
Specifications and identifiers
supported identity
MaterialSilicon
The item is repeatedly described as a silicon slab.
Function/contextPedestal slab
A process-chamber/pedestal consumable or insert-like component.
Vendor cross-referenceWest Coast Quartz 91-01627 / 91-01627A
Cross-reference appears in some descriptions; verify against markings.
Applications
process chambersPVD/CVD/etch hardwarewafer-edge controlgas distribution or chamber shieldingPedestal hardwareProcess-chamber silicon component
How it works

A process-chamber mechanical or consumable component shaped for a specific wafer size, chamber location, or process module.

Geometry, material, coating, cleanliness, and wafer-size compatibility can directly affect plasma behavior, particle control, and fit.

Technical guide
possible

ceramic, quartz, silicon, aluminum, stainless steel, titanium, or coated metals may be used depending on the specific component; only listed materials should be treated as confirmed

CVD
chemical vapor deposition
ESC
electrostatic chuck
HDP-CVD
high-density plasma chemical vapor deposition
PVD
physical vapor deposition
What to verify before purchase
  • Verify slab dimensions, revision, surface condition, and exact cross-reference.
Confirm with the seller
  • Exact tool/chamber compatibility and whether the item is new, reworked, or refurbished are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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