Product description
S-type slit valve/operator kit for P5000 cleanroom use, with 513 Chemraz/removeable wording in supported descriptions.
Specifications and identifiers
valve details
| Configuration | S-type slit valve operator / kit Supported descriptions include S-slit valve and operator wording. |
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| Seal material reference | 513 Chemraz Seal material/kit descriptor appears in item wording. |
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| Platform context | P5000 cleanroom Likely use context from supported wording. |
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Applications
Gas delivery panelsVacuum forelinesSlit-valve/load-lock assembliesLiquid injection systemsSlit valve operation in load-lock or chamber isolationP5000 service kit or actuator/flapper replacement
How it works
A valve or valve assembly controls gas, vacuum, purge, or process-fluid flow in a tool subsystem.
Valve type, actuation method, seal material, pressure rating, port style, and cleanliness determine whether it can be safely used in a process system.
Technical guide
common
Often stainless steel, aluminum, elastomer seals, and pneumatic or heated actuator components depending on design.
pneumatic actuation
Many semiconductor valves are pneumatically actuated and may include position sensing or heaters.
What to verify before purchase
- Verify whether the kit includes actuator, flapper, seals, and removable hinge hardware.
- Confirm Chemraz compound and slit-valve orientation before use.
Confirm with the seller
- Exact chamber position is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.