Product description
H-slit-valve kit / slit valve actuator assembly using 520 Chemraz seal material and removable-hinge wording.
Specifications and identifiers
valve identity
| Valve type | H slit valve / slit valve assembly Repeated slit valve identity. |
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| Seal material | 520 Chemraz Seal material explicitly repeated. |
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| Feature | Removable hinge Appears in kit wording and should be verified physically. |
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Applications
gas boxesvacuum isolationslit valve and load-lock mechanismsprocess fluid deliveryslit valve service kitload-lock or chamber isolation valve rebuild
How it works
A valve assembly controls, isolates, or meters gas, liquid, or vacuum paths in a semiconductor tool.
Correct valve style, seal material, port pattern, and actuator type are critical for process integrity and leak-free operation.
Technical guide
APC
Automatic pressure control, often implemented through pressure-control valve hardware.
What to verify before purchase
- Confirm whether buyer needs the complete kit, actuator assembly, or only the slit-valve hardware.
- Verify Chemraz 520 seal material and removable-hinge configuration.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.