Product description
Applied Materials 0270-02726 blankoff for 300 mm HDP-CVD chamber lid / Ultima context.
Specifications and identifiers
identification
| Description | Blankoff, chamber lid |
|---|
| Nominal size | 300 mm |
|---|
| Reported context | HDP-CVD Ultima |
|---|
Applications
PVD/CVD chamber kitsESC/focus ring stacksprocess-facing consumablesChamber lid blankoff replacement300 mm HDP-CVD chamber serviceVacuum/process port blanking
How it works
A process-facing ring, plate, or insulator used near the wafer, chuck, or chamber opening.
Geometry, material, coating, cleanliness, and revision affect fit, contamination control, plasma behavior, and wafer handling.
What to verify before purchase
- Verify bolt pattern, seal interface, and material
- Confirm HDP-CVD Ultima chamber compatibility
- Inspect sealing surfaces and flatness
Confirm with the seller
- Exact chamber revision is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.