Product description
Applied Materials 0500-01076 Granville-Phillips 352001 ion/vacuum gauge controller assembly, described for 300 mm DeviceNet context.
Specifications and identifiers
identification
| Supplier/model | Granville-Phillips 352 / 352001 |
|---|
| Function | Vacuum / ion gauge controller |
|---|
| Reported context | 300 mm DNET / DeviceNet |
|---|
Applications
wafer presence detectionvacuum and pressure monitoringRF power measurementflow/pressure monitoringVacuum gauge controlIon gauge readout/control300 mm tool vacuum monitoring
How it works
A sensor, gauge, or measurement module used to detect wafer presence, pressure, flow, power, or other tool conditions.
Sensor type, calibration, setpoint, output format, and wiring determine whether the tool can safely detect state changes.
Technical guide
ion gauge
vacuum measurement method for low pressures
photoelectric sensing
optical detection of object presence
What to verify before purchase
- Verify input power and communication interface
- Confirm gauge sensor compatibility
- Check calibration and display/controller function
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.