C3910 MKS REMOTE PLASMA SOURCE, P/N: FI20620-1, AMAT 0920-00013 ASTRON 2L2626 ASTEX MKS ASTRON 2L, AMAT 0920-00013 FI20620-1MKS REMOTE PLASMA SOURCE, MKS P/N: FI20620-1-C / ASTRON2L / AMAT 0920-00013MKS Astex Astron 2L w/one missing CPU Board FI20620-1 AMAT 0920-00013MKS ASTeX ASTRON 2L FI20620-1 REMOTE PLASMA SOURCE RPS GENERATOR AMAT 0920-00013MKS Astex Astron 2L w/one missing CPU Board FI20620-1 AMAT 0920-00013MKS FI20620-1 Remote Plasma Supply ASTRON2L REV: D AMAT P/N : 0920-00013MKS Astex Astron 2L w/one missing CPU Board FI20620-1 AMAT 0920-000130920-00013 / MKS ASTRON2L FI20620-1 GEN FLUORINE 208VAC 3PHASE W ENH. AR / AMAT0920-00013 / MKS ASTRON2L FI20620-1 GEN FLUORINE 208VAC 3PHASE W ENH. AR / AMATAMAT 0920-00013 MKS RPSAMAT 0920-00013 FI20620-1, AMAT, GEN FLUORINE 208VAC 3PHASE W/ENHANCE, USED332-0201// AMAT APPLIED 0920-00013 TESTED GEN FLUORINE 208VAC 3PHASE REFURBISHEDMKS ASTeX FI20620-1, RPS 2L, AMAT P/N: 0920-00013, REV:DMKS ASTeX ASTRON 2L REMOTE PLASMA SOURCE FI20620-1 AMAT 0920-00013MKS ASTRON 2L RPS FI20620-1 PLASMA SOURCE AMAT 0920-00013MKS ASTRON FI20620-1, AMAT 0920-00013, 2L ASTeX RPS, Remote Plasma Source SN7588MKS ASTRON FI20620-1, AMAT 0920-00013, 2L ASTeX RPS, Remote Plasma Source SNMKS ASTRON FI20620-1, AMAT 0920-00013, 2L ASTeX RPS, Remote Plasma Source SN8954MKS ASTRON FI20620-1, AMAT 0920-00013, 2L ASTeX RPS, Remote Plasma Source SN37050920-00013 // GEN FLOURINE 208VAC 3PHASE W/ENHANCED AR MKS ASTeX ASTRON 2L RPS FI20620-1 (PN: 0920-00013)MKS ASTeX FI20620-1 AMAT P/N 0920-00013 2L RPSMKS ASTeX FI20620-1, RPS 2L, AMAT P/N: 0920-00013, REV:D0920-00013, MKS PN FI20620-1, AMAT, GEN FLUORINE 208VAC 3PHASE W/ENHANCE 0920-00013 Genratr, FLUORINE,208VAC,W/EASTRON ASTeX AX7651-2 RPS Plasma AMAT 0920-00013 243 Hours Used Tested WorkingASTRON ASTeX AX7651-2 RPS Plasma AMAT 0920-00013 224 Hours Used Tested WorkingASTRON ASTeX AX7651-2 RPS Plasma AMAT 0920-00013 238 Hours Used Tested WorkingMKS ASTeX FI20620-1 AMAT P/N 0920-00013 2L RPSMKS ASTeX ASTRON 2L RPS FI20620-1 AMAT P/N 0920-00013MKS/ ASTEX ASTRON 2L REV H FI20620-1 AMAT 0920-00013 REMOTE PLASMA SOURCE RPSASTRON MKS Instruments FI2062-1-C ASTRON2L Rev. D AMAT 0920-00013 Tested UsedASTRONAL MKS Instruments FI2060-1 Rev. D AMAT 0920-00013 Used tested WorkingASTRON2L MKS Instruments FI20620-1 Rev. H AMAT 0920-00013 Tested Not WorkingMKS Instruments FI20620-1 Plasma Source ASTRON2L Rev. G AMAT 0920-00013 UsedASTRONAL MKS Instruments FI2060-1-C Rev. D AMAT 0920-00013 Used tested WorkingMKS Instruments FI20620-1 Remote Plasma Source ASTRON2L Rev.D AMAT 0920-00013
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APPLIED MATERIALS 0920-00013

MKS ASTeX ASTRON 2L Remote Plasma Source

Market Availability & Pricing

Part number0920-00013
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales12000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › Plasma & RF Systems › Remote Plasma Sources
MKS ASTeX ASTRON 2L Remote Plasma Source
APPLIED MATERIALS0920-00013remote plasma source
Product description
MKS ASTeX ASTRON 2L FI20620-1 Remote Plasma Source / Fluorine Generator
Specifications and identifiers
observed identity
ModelMKS ASTeX ASTRON 2L / FI20620-1
Most listings identify the unit as an ASTRON 2L remote plasma source with FI20620-1.
FunctionRemote plasma source / fluorine generator
Titles use RPS, remote plasma source, and generator fluorine wording.
Power detail208 VAC 3 phase with enhanced argon mentioned
Several titles include this electrical/gas ignition context; verify on nameplate.
Applications
chamber clean systemsfluorine radical generationCVD/etch support equipmentRemote plasma cleaning or fluorine generationReplacement MKS ASTeX ASTRON 2L source
How it works

A remote plasma source generates reactive plasma species remotely and feeds them to a process or cleaning chamber.

RPS units are configuration-critical because power, gas, ignition, cooling, control interface, and chamber chemistry must match.

Technical guide
remote plasma source

Generates plasma outside the main process chamber to create reactive cleaning or process species.

ASSY
Assembly.
ASTeX
MKS ASTeX plasma source brand/family.
FI20620-1
Model number seen in the listing evidence.
P/N
Part number.
PCB
Printed circuit board.
RPS
Remote plasma source.
Rev
Revision level; match for replacement.
What to verify before purchase
  • Confirm exact FI20620-1 revision and AMAT part label.
  • Verify input voltage, gas configuration, cooling, and control interface.
  • Check missing CPU board or as-is condition claims on individual units.
Confirm with the seller
  • Exact tool platform
  • Operational condition
  • Whether FI20620-1-C variant is interchangeable

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

C3910 MKS REMOTE PLASMA SOURCE, P/N: FI20620-1, AMAT 0920-00013 ASTRON 2L

C3910 MKS REMOTE PLASMA SOURCE, P/N: FI20620-1, AMAT 0920-00013 ASTRON 2L

USD 21000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Sep 27, 2024 03:01 UTC
End recorded: Dec 7, 2024 04:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
2626 ASTEX MKS ASTRON 2L, AMAT 0920-00013 FI20620-1

2626 ASTEX MKS ASTRON 2L, AMAT 0920-00013 FI20620-1

USD 12183.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 10, 2023 07:30 UTC
End recorded: Dec 6, 2024 17:59 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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