ADVANCED ENERGY AE APEX 3013 3156114-006 RF GENERATOR AMAT 0920-00139AMAT 0920-00139 ADVANCED ENERGY APEX 3013 RF GENERATOR 3156114-006Advanced Energy AE Apex 3013 RF Generator 3156114-006 AMAT 0920-00139AE Apex 3013 RF Generator AMAT 0920-001390920-00139 // APEX 3013 ADVANCED ENERGYAMAT 0920-00139 Apex 3013 AE Advanced Energy RF Generator Used working 3156114-6AMAT 0920-00139 Apex 3013 AE Advanced Energy RF Generator Used working 3156114-6AMAT 0920-00139 ADVANCED ENERGY 3156114-006 A APEX3013 , USEDAE Apex 3013 RF Generator 3156114-006A 3KW 13.56MHZ 0920-00139 AMAT / WarrantyAE Apex 3013 RF Generator 3156114-006A 3KW 13.56MHZ 0920-00139 AMAT / Warranty
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APPLIED MATERIALS 0920-00139

Advanced Energy APEX 3013 RF generator

Market Availability & Pricing

Part number0920-00139
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales4700 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Advanced Energy APEX 3013 RF generator
APPLIED MATERIALS0920-00139RF generator
Product description
Advanced Energy APEX 3013 RF generator, 3 kW at 13.56 MHz, associated with Applied Materials part number 0920-00139 and AE identifier 3156114-006.
Specifications and identifiers
part attributes
VendorAdvanced Energy
Vendor consistently identified.
ModelAPEX 3013
Repeated model identifier.
Related AE part3156114-006 / 3156114-006A
Associated Advanced Energy identifier.
Nameplate rating3 kW, 13.56 MHz
Specified repeatedly; verify nameplate.
Equipment context
  • Applied Materials RF-powered process chamber
Applications
plasma etchPECVDPVD sputteringRF-powered process chambersplasma RF power generationRF generator replacementPVD/CVD/etch power delivery
How it works

An RF power delivery component used to generate, condition, or match radio-frequency energy for plasma processing.

RF generators and matching networks must match frequency, power range, connector style, control interface, cooling, and chamber configuration.

Technical guide
impedance_matching

RF matching networks tune the load seen by a generator so power transfers efficiently into the process chamber.

MHz
Megahertz frequency rating; common semiconductor RF systems include 13.56 MHz and other process-specific frequencies.
What to verify before purchase
  • Confirm exact AE suffix and AMAT revision.
  • Verify power, frequency, cooling, AC input, and communication interface.
  • Check service history and output calibration.
Confirm with the seller
  • Exact installed chamber compatibility is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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