Product description
Advanced Energy APEX 3013 RF generator, 3 kW at 13.56 MHz, associated with Applied Materials part number 0920-00139 and AE identifier 3156114-006.
Specifications and identifiers
part attributes
| Vendor | Advanced Energy Vendor consistently identified. |
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| Model | APEX 3013 Repeated model identifier. |
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| Related AE part | 3156114-006 / 3156114-006A Associated Advanced Energy identifier. |
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| Nameplate rating | 3 kW, 13.56 MHz Specified repeatedly; verify nameplate. |
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Equipment context
- Applied Materials RF-powered process chamber
Applications
plasma etchPECVDPVD sputteringRF-powered process chambersplasma RF power generationRF generator replacementPVD/CVD/etch power delivery
How it works
An RF power delivery component used to generate, condition, or match radio-frequency energy for plasma processing.
RF generators and matching networks must match frequency, power range, connector style, control interface, cooling, and chamber configuration.
Technical guide
impedance_matching
RF matching networks tune the load seen by a generator so power transfers efficiently into the process chamber.
- MHz
- Megahertz frequency rating; common semiconductor RF systems include 13.56 MHz and other process-specific frequencies.
What to verify before purchase
- Confirm exact AE suffix and AMAT revision.
- Verify power, frequency, cooling, AC input, and communication interface.
- Check service history and output calibration.
Confirm with the seller
- Exact installed chamber compatibility is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.