0920-01124, AMAT, GEN FLUORINE 208VAC 3PHASE W/ ARGON IGNITIONAPPLIED MATERIALS AMAT 0920-01124 GENERATOR FLUORINE SOURCE FI20620 (BAD)APPLIED MATERIALS AMAT 0920-01124 GENERATOR FLUORINE SOURCE ASTEX FI20620 "BAD"0920-01124, AMAT, GEN FLUORINE 208VAC 3PHASE W/ ARGON IGNITIONAPPLIED MATERIALS AMAT 0920-01124 GENERATOR FLUORINE SOURCE ASTEX FI20620 "BAD"AMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS Astex FI20620 Remote Plasma Source Astron AMAT 0920-01124 / WarrantyAMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS Astex FI20620 Remote Plasma Source Astron AMAT 0920-01124 / WarrantyAMAT MKS ASTeX FI20620 Fluorine Generator Astron-2L AMAT 0920-01124 / WarrantyAMAT MKS Astex FI20620 Remote Plasma Source Astron AMAT 0920-01124AMAT MKS Astex FI20620 Remote Plasma Source Astron AMAT 0920-01124AMAT MKS Astex FI20620 Remote Plasma Source Astron AMAT 0920-01124 / WarrantyAMAT MKS Astex FI20620 Remote Plasma Source Astron AMAT 0920-01124 / WarrantyMKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124ASTeX FI20620 Remote Plasma Source ASTRON AMAT 0920-01124 Tested As-IsMKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124MKS ASTeX ASTRON Remote Plasma Source, Model # FI20620, AMAT # 0920-01124ASTeX ASTRON Remote Plasma Source FI20620 Rev.D 0920-01124 as-is
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APPLIED MATERIALS 0920-01124

MKS ASTeX ASTRON Remote Plasma Fluorine Source

Market Availability & Pricing

ASTeX ASTRON Remote Plasma Source FI20620

Part number0920-01124
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales6000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › Remote Plasma Sources
MKS ASTeX ASTRON Remote Plasma Fluorine Source
APPLIED MATERIALS0920-01124remote plasma source
Product description
MKS ASTeX ASTRON FI20620 Remote Plasma Source / Fluorine Generator, 208VAC 3 Phase with Argon Ignition
Specifications and identifiers
observed identity
Vendor/modelMKS ASTeX ASTRON FI20620
Multiple titles associate the AMAT part with ASTeX/Astron model FI20620.
FunctionRemote plasma source / fluorine generator
Listings identify the unit as a remote plasma source or fluorine source generator.
Electrical detail208VAC 3 phase with argon ignition mentioned
One title provides electrical/ignition context; verify nameplate before use.
RevisionRev D mentioned
Revision should be verified.
Applications
remote plasma chamber cleaningfluorine radical generationsemiconductor CVD/etch support systemsRemote plasma cleaning sourceFluorine radical generation for semiconductor chamber cleaning
How it works

A remote plasma source generates plasma away from the main process chamber, often to create reactive species for chamber cleaning or surface treatment.

Remote plasma sources involve high voltage/RF power, process gases, cooling, and safety interlocks; exact model and electrical configuration must match the tool.

Technical guide
3 phase
Three-phase AC power input.
ASTeX
ASTeX is a plasma-source product/vendor name associated with MKS.
RPS
Remote plasma source.
What to verify before purchase
  • Confirm FI20620/Astron label, revision, electrical input, gas fittings, and cooling requirements.
  • Test interlocks and ignition functionality before installation.
  • Treat bad/as-is listings as condition-specific, not identity facts.
Confirm with the seller
  • Exact tool platform
  • Complete electrical ratings beyond titles
  • Operational condition

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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Prices and availability may change. Confirm details with the seller.

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