Product description
Advanced Energy Navigator matching network, 13.56 MHz, associated with 3155162-736 and part number 1027756.
Specifications and identifiers
part attributes
| Manufacturer | Advanced Energy Manufacturer is directly identified. |
|---|
| Family | Navigator Repeated in product notes. |
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| Related AE identifier | 3155162-736 Associated with the matching network. |
|---|
| Frequency | 13.56 MHz Specified in product notes. |
|---|
Equipment context
- RF plasma process equipment
Applications
plasma etchPECVDPVD sputteringRF-powered process chambersRF impedance matchingplasma process power deliverymatching network replacement
How it works
An RF power delivery component used to generate, condition, or match radio-frequency energy for plasma processing.
RF generators and matching networks must match frequency, power range, connector style, control interface, cooling, and chamber configuration.
Technical guide
impedance_matching
RF matching networks tune the load seen by a generator so power transfers efficiently into the process chamber.
- MHz
- Megahertz frequency rating; common semiconductor RF systems include 13.56 MHz and other process-specific frequencies.
What to verify before purchase
- Confirm exact AE part number and Navigator configuration.
- Verify frequency, power rating, tuning method, and cooling.
- Check connector and control interface compatibility.
Confirm with the seller
- Power rating and chamber/tool compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.