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NOVELLUS 15-134732-00

200 mm pedestal concentric lift hub

Market Availability & Pricing

Part number15-134732-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Wafer Handling & Lift Hardware › Pedestal Lift Hubs
200 mm pedestal concentric lift hub
NOVELLUS15-134732-00pedestal lift hub
Product description
Hub, 200 mm, pedestal concentric lift.
Specifications and identifiers
identification
OEM part number15-134732-00
Normalized descriptionHub, 200 mm, pedestal concentric lift
Wafer/process size referenced200 mm
Equipment context
  • Novellus 200 mm pedestal lift subsystem
Applications
pedestal lift mechanismswafer support/lift hardware200 mm Novellus process modulespedestal lift hardware replacementwafer support mechanism service200 mm chamber mechanical repair
How it works

A pedestal lift hub is a mechanical component in a lift or pedestal mechanism, helping support or align moving wafer-support hardware.

Lift hub fit and alignment can affect wafer transfer, pedestal motion, and chamber hardware clearance.

Technical guide
concentric lift
A lift arrangement centered around a common axis; exact design should be verified.
ped
Pedestal.
What to verify before purchase
  • Confirm dimensions and wear condition.
  • Verify fit to exact pedestal/lift mechanism.
  • Inspect hub bore, mounting surfaces, and concentricity-critical features.
Confirm with the seller
  • Material.
  • Exact chamber/tool compatibility.
  • Revision.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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