LAM RESEARCH 4528i ELECTROSTATIC 8" CHUCK ISOTROPIC ETCH 230-140148-308LAM RESEARCH 4528I ISOTROPIC ETCH INVAX ELECTRODE JEIDA ESC 8"  230.140148-308LAM 230-140148-308 CAP, Electrode, JDA, ESC, 8", Mono, 421225Lam Research ESC 230-140148-308 8" Electrostatic ChuckLAM RESEARCH 4528I ISOTROPIC ETCH INVAX ELECTRODE JEIDA ESC 8"  230-140148-308LAM RESEARCH 230-140148-308 CAP, ELCTD, JDA, ESC, 8", MONO, NEWLam Research ESC 230-140148-308 8" Electrostatic ChuckLam Research ESC 230-140148-308 8" Electrostatic ChuckLam Research ESC 230-140148-308 8" Electrostatic ChuckLam Research ESC 230-140148-308 8" Electrostatic ChuckLam Research ESC 230-140148-308 8" Electrostatic Chuck
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LAM RESEARCH 230-140148-308

8-Inch ESC Electrode Cap

Market Availability & Pricing

Part number230-140148-308
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales900 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrostatic Chuck Parts
8-Inch ESC Electrode Cap
LAM RESEARCH230-140148-308ESC electrode cap
Product description
Lam Research 8 inch electrostatic chuck/electrode cap for 4528i isotropic etch / JEIDA/JDA ESC context.
Specifications and identifiers
identified features
Component typeElectrode cap / ESC-related component
Evidence ties the part to an electrostatic chuck/electrode assembly.
Wafer size8 inch / 200 mm class
8 inch is reported in evidence.
Platform clueLam 4528i isotropic etch
Platform context appears in evidence and should be verified.
Equipment context
  • Lam Research 4528i isotropic etch
Applications
wafer clampingplasma process chambersPVD/etch modulesthermal/mechanical chamber supportESC/electrode serviceetch chamber hardware replacementwafer clamping hardware
How it works

A chamber part associated with wafer clamping or electrostatic chuck support.

ESC-related parts must match wafer size, chamber configuration, insulation requirements, and process environment.

Technical guide
ESC

Electrostatic chuck system used to hold wafers during processing.

ESC
Electrostatic chuck.
What to verify before purchase
  • Confirm whether the required item is the cap/electrode part or a complete ESC assembly.
  • Verify size, revision, material, and chamber compatibility.
Confirm with the seller
  • Exact material and complete assembly contents are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH 4528i ELECTROSTATIC 8" CHUCK ISOTROPIC ETCH 230-140148-308

LAM RESEARCH 4528i ELECTROSTATIC 8" CHUCK ISOTROPIC ETCH 230-140148-308

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 15, 2022 16:00 UTC
End recorded: Dec 7, 2024 03:03 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

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