Product description
Novellus-assigned Advanced Energy PDX 5000 / 5 kW RF generator, AE part 3156043-104.
Specifications and identifiers
identified features
| Vendor/model | Advanced Energy PDX 5000 RF generator model appears consistently. |
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| Power clue | 5 kW reported Power rating appears in evidence; verify nameplate. |
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| AE part clue | 3156043-104 Advanced Energy part number appears in evidence. |
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Equipment context
- Novellus RF power subsystem
Applications
plasma process modulesPVD/CVD/etch RF systemsimpedance matchingRF power deliveryRF plasma power deliverygenerator replacementNovellus RF system service
How it works
An RF matching network or RF generator-related assembly used to couple RF power into a process load.
RF match and generator compatibility affects plasma stability, delivered power, reflected power, and process repeatability.
Technical guide
RF matching
Adjusts impedance between an RF generator and plasma/load to reduce reflected power.
- RF
- Radio frequency.
- match
- Impedance matching network.
What to verify before purchase
- Confirm frequency, input voltage, output connector, interface, revision, and AE/Novellus cross-reference.
- Verify operating condition and calibration/service history.
Confirm with the seller
- Exact frequency and configuration are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.