27-113711-00 / PDX 5000, RF GENERATOR, AE# 3156043-104 / NOVELLUSAdvanced Energy AE Generator 5.0 KW PDX 5000 3156043-104 A Novellus 27-113711-00Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 Advanced Energy AE PDX 5000 5kW MF RF Generator Novellus 27-113711-00 ADVANCED ENERGY PDX 5000 LF RF GENERATOR P# 3156043-104 NOVELLUS P# 27-113711-00
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NOVELLUS 27-113711-00

Advanced Energy PDX 5000 RF Generator

Market Availability & Pricing

Part number27-113711-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported sales4499.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Advanced Energy PDX 5000 RF Generator
NOVELLUS27-113711-00RF generator
Product description
Novellus-assigned Advanced Energy PDX 5000 / 5 kW RF generator, AE part 3156043-104.
Specifications and identifiers
identified features
Vendor/modelAdvanced Energy PDX 5000
RF generator model appears consistently.
Power clue5 kW reported
Power rating appears in evidence; verify nameplate.
AE part clue3156043-104
Advanced Energy part number appears in evidence.
Equipment context
  • Novellus RF power subsystem
Applications
plasma process modulesPVD/CVD/etch RF systemsimpedance matchingRF power deliveryRF plasma power deliverygenerator replacementNovellus RF system service
How it works

An RF matching network or RF generator-related assembly used to couple RF power into a process load.

RF match and generator compatibility affects plasma stability, delivered power, reflected power, and process repeatability.

Technical guide
RF matching

Adjusts impedance between an RF generator and plasma/load to reduce reflected power.

RF
Radio frequency.
match
Impedance matching network.
What to verify before purchase
  • Confirm frequency, input voltage, output connector, interface, revision, and AE/Novellus cross-reference.
  • Verify operating condition and calibration/service history.
Confirm with the seller
  • Exact frequency and configuration are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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