RFG 5500 AE Advanced Energy 3155051-015 HF Generator Novellus 27-115617-00 As-IsNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorNovellus 27-115617-00 Advanced Energy AE RFG 5500 3155051-115 5KW HF GeneratorAE Advanced Energy RFG 5500 RF Generator 3155051-015 as-is 27-115617-00
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NOVELLUS 27-115617-00

Advanced Energy RFG 5500 RF Generator

Market Availability & Pricing

RF GENERATOR ADVANCED ENERGY P/N: 3155051-015

Part number27-115617-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported sales15011.2 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Advanced Energy RFG 5500 RF Generator
NOVELLUS27-115617-00RF generator
Product description
Advanced Energy RFG 5500 HF/RF Generator, 5kW class mentioned
Specifications and identifiers
observed identity
ModelAdvanced Energy RFG 5500
Multiple titles identify AE RFG 5500.
Power class5kW mentioned
One title mentions 5KW; verify nameplate.
Alternate part3155051-015 / 3155051-115 mentioned
Possible AE identifiers should be verified.
Applications
Novellus process toolsRF plasma powerAdvanced Energy RF generatorsRF power generator replacementPlasma process power source
How it works

An RF generator supplies radio-frequency power used for plasma generation or process control.

Exact power, frequency band, interface, and condition must match the tool and matching network.

Technical guide
HF
High frequency in RF generator context.
RFG
RF generator.
What to verify before purchase
  • Match exact part number, revision, connector/flange/mechanical details, and physical markings before installation.
Confirm with the seller
  • Exact tool compatibility unless stated in evidence
  • Revision interchangeability

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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