AE, Novellus RF MATCH 13.56 MHZ MERCURY 3013, p/n 27-255873-00, 3150274-00827-255873-00 / RF MATCH,13.56MHZ,MERCURY 3013 C2 ALTUS SEQUEL SPEED/ NOVELLUSAE, Novellus RF MATCH 13.56 MHZ MERCURY 3013, p/n 27-255873-00, 3150274-008Novellus AE ADVANCED ENERGY MERCURY 3013 MATCH 27-255873-00Novellus AE ADVANCED ENERGY MERCURY 3013 MATCH 27-255873-00Novellus AE MERCURY 3013 MATCH 27-255873-00AE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2, WorkingAE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2AE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2AE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2AE MERCURY 3013 MATCH / 27-255873-00 / RF MATCER / NOVELLUS SPD-S C2
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NOVELLUS 27-255873-00

Advanced Energy Mercury 3013 RF Match

Market Availability & Pricing

Part number27-255873-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported sales6500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Match Networks
Advanced Energy Mercury 3013 RF Match
NOVELLUS27-255873-00RF Match Network
Product description
Advanced Energy Mercury 3013 RF match, 13.56 MHz
Specifications and identifiers
component details
Component typeRF match network
Impedance matching unit between RF generator and plasma load.
OEM/modelAdvanced Energy Mercury 3013
Model appears repeatedly.
Frequency13.56 MHz
Frequency appears in product identity evidence.
Related AE part3150274-008
Related Advanced Energy reference appears in one record.
identification
ManufacturerNOVELLUS
Part number27-255873-00
Applications
plasma processingRF power deliveryUV or microwave subsystemssemiconductor chamber power electronicsRF impedance matchingPlasma chamber RF power deliveryNovellus process tool RF subsystem service
How it works

A rf match network is a power electronics component used to generate, tune, or deliver energy in process equipment.

Power rating, frequency, cooling, connectors, and control interface must match the tool configuration before installation.

Technical guide
13.56 MHz

Common industrial RF frequency used in plasma processing.

Mercury 3013

Advanced Energy RF match model/family designation.

RF match

Network that tunes impedance to improve RF power transfer into a plasma chamber.

What to verify before purchase
  • Connector/cooling configuration
  • Tuning range and motor/control interface
  • AE part number mapping
Confirm with the seller
  • Specific Novellus tool compatibility

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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