27-368450-00 / NOVELLUS RF MATCH ADVANCED ENERGY RF NAVIGATOR 10013 3155162-037CAdvanced Energy AE 3155162-037 Navigator RF Match, Novellus 27-368450-00, 423804Navigator 10013 AE Advanced Energy 3155162-037 RF Novellus 27-368450-00 WorkingNavigator 10013 AE Advanced Energy 3155162-037 RF Novellus 27-368450-00 Cu SpareAdvanced Energy AE 3155162-037 Navigator RF Match, Novellus 27-368450-00AE Advanced Energy 27-368450-00 B RF Navigator 10013 3155162-037 Novellus UsedAdvanced Energy AE 3155162-037 Navigator RF Match, Novellus 27-368450-00, 423803AE Advanced Energy 27-368450-00 Navigator RF Match Novellus Vector 300mmAE Advanced Energy R27-368450-00 Navigator 10013 RF Match 3155162-037 As-Is
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NOVELLUS 27-368450-00

Advanced Energy Navigator RF Match

Market Availability & Pricing

Part number27-368450-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported sales2475.56 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching & Generators
Advanced Energy Navigator RF Match
NOVELLUS27-368450-00RF matching network
Product description
Advanced Energy Navigator 10013 RF matching network, reference 3155162-037, mapped to Novellus 27-368450-00.
Specifications and identifiers
identified features
VendorAdvanced Energy
Series/modelNavigator 10013
FunctionRF match
Reference3155162-037
Equipment context
  • Novellus Vector 300mm
Applications
plasma etchPVD and CVD RF deliveryimpedance matching networksRF impedance matchingNovellus plasma process module RF delivery
How it works

An RF matching network or RF power component is used in plasma systems to deliver or condition RF energy.

RF parts are highly configuration-specific; frequency, power rating, impedance, and connector configuration must match the chamber design.

What to verify before purchase
  • Verify power/frequency rating, Navigator configuration, connector layout, and Novellus mapping.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

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