STEC LF-310A-EVD Liquid Flow Controller LFC TEPO 0.2g/min AMAT 3030-05748 421664AMAT 3030-05748 LFM LF-310A-EVD TEPO 0.2G/MIN F.S. 1/4& 1/8 STEC INC LF-310A-EVDAMAT 3030-05748 LFM LF-310A-EVD TEPO .2G/MIN F.S. 1/4&  STEC INC LF-310A-EVDAMAT 3030-05748 LFM LF-310A-EVD TEPO 0.2G/MIN F.S. 1/4& 1/8 STEC INC LF-310A-EVDNew Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748New Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748New Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748New Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748New Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748New Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748New Horiba  LF-310A MFC, LF-310A-EVD, TEPO, 0.2 g/min, AMAT 3030-05748NEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinNEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinNEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinNEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinNEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinNEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinNEW AMAT 3030-05748 Stec LF-310A-EVD Mass Flow Controller Liquid TEPO 0.2 g/MinAMAT 3030-05748 STEC  LF-310A-EVD TEPO  0.2 g/min Liquid Mass Flow Controller
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APPLIED MATERIALS 3030-05748

Horiba STEC LF-310A-EVD Liquid Flow Controller

Market Availability & Pricing

Part number3030-05748
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1750 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Gas Delivery › Liquid Delivery › Liquid Flow Controllers
Horiba STEC LF-310A-EVD Liquid Flow Controller
APPLIED MATERIALS3030-05748Liquid flow controller
Product description
Horiba/STEC LF-310A-EVD liquid mass flow controller for TEPO, 0.2 g/min
Specifications and identifiers
supported identifiers
OEM/modelHoriba/STEC LF-310A-EVD
Repeated supported model.
Chemical/serviceTEPO
Process chemical/service noted in evidence.
Flow range0.2 g/min
Repeated flow setting; verify nameplate.
Connections1/4 and 1/8 references
Connection sizes appear in evidence but require verification.
Applications
Liquid precursor deliveryTEPO process chemical meteringCVD precursor delivery systemsLiquid precursor deliveryTEPO process chemical meteringCVD precursor delivery systems
How it works

A liquid flow controller meters liquid precursor delivery by mass or equivalent flow rate.

Accurate liquid precursor flow is critical for film composition, deposition rate, and process repeatability.

Technical guide
TEPO
Triethyl phosphate context likely
What to verify before purchase
  • Confirm chemical calibration, full-scale flow, fittings, seals, and cleanliness for the intended precursor.
Confirm with the seller
  • Calibration status, wetted materials, and exact process compatibility are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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