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APPLIED MATERIALS 3030-07346

Aera FC-D980C 200 sccm Cl2 MFC

Market Availability & Pricing

Part number3030-07346
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales160 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Fluid & Gas › Flow Control › Mass Flow Controllers
Aera FC-D980C 200 sccm Cl2 MFC
APPLIED MATERIALS3030-07346mass flow controller
Product description
Aera FC-D980C / 5RA FC-D980C Mass Flow Controller, CL2, 200 sccm
Specifications and identifiers
observed identity
Vendor/modelAera FC-D980C / 5RA FC-D980C
Listings consistently identify the Aera MFC model family.
Gas/rangeCL2, 200 sccm
Multiple listings specify chlorine gas and 200 sccm flow.
Part functionMFC
MFC means mass flow controller.
Applications
semiconductor gas panelschlorine process gas controletch or clean gas deliveryCl2 gas flow controlReplacement Aera mass flow controller
How it works

A mass flow controller regulates process gas flow to a commanded setpoint.

Gas calibration, flow range, seals, communication/interface, and contamination history are critical for safe reuse.

Technical guide
mass flow control

Controls gas flow using a sensor, valve, and calibration for a specific gas/range.

ASSY
Assembly.
CL2
Chlorine gas.
MFC
Mass flow controller.
P/N
Part number.
PCB
Printed circuit board.
Rev
Revision level; match for replacement.
sccm
Standard cubic centimeters per minute.
What to verify before purchase
  • Confirm gas calibration is CL2 and range is 200 sccm.
  • Verify fittings, electrical interface, and valve response.
  • Treat chlorine-service history as contamination/safety critical.
Confirm with the seller
  • Exact communication protocol
  • Seal material
  • Calibration validity

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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