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APPLIED MATERIALS 3030-07652

Aera FC-D980C Mass Flow Controller, He 500 sccm

Market Availability & Pricing

Part number3030-07652
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales35 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Flow Control › Mass Flow Controllers › Gas MFCs
Aera FC-D980C Mass Flow Controller, He 500 sccm
APPLIED MATERIALS3030-07652mass flow controller
Product description
Aera FC-D980C 10 Ra mass flow controller calibrated for helium at 500 sccm.
Specifications and identifiers
supported identity
Manufacturer/modelAera FC-D980C
MFC family/model indicated in multiple sources.
Range10 Ra
Range descriptor appears in evidence.
GasHe
Helium gas calibration indicated.
Flow rate500 sccm
Repeatedly stated flow rate.
Applications
gas delivery panelschemical delivery systemssemiconductor process toolsHelium gas flow controlProcess gas delivery
How it works

A mass flow controller or flow controller used to meter process gas or liquid flow.

Accurate flow control is critical for repeatable process chemistry, chamber pressure behavior, and recipe stability.

Technical guide
SLM
Standard liters per minute, a gas flow-rate unit.
sccm
Standard cubic centimeters per minute, a gas flow-rate unit.
What to verify before purchase
  • Verify calibration gas, full-scale range, connector style, and AMAT mapping before installation.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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