Horiba Stec, LF-410A-EVD, LFC, TEOS, 4.0g/min, AMAT 3030-07663, 451958STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 451864STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 451863STEC LF-410A LFC, LF-410A-EVD, TEOS, 4.0g/min, AMAT 3030-07663, 324020STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 4154913030-07663 / LFMLF-410A-EDV TEOS 4G/MIN F:S 1/4&1/8FHoriba Stec, LF-410A-EVD, LFC, LFM, TEOS, 4g/min, AMAT 3030-07663, 451963Horiba Stec, LF-410A-EVD, LFC, TEOS, 4g/min, AMAT 3030-07663, 451961AMAT 3030-07663 HORIBA STEC MFC LF-410A-EVD TEOS 4g/min - NEWAMAT 3030-07663, LFM, LF-410A-EVD TEOS 4G/MINSTEC INC./ AMAT LF-410A-EVD/ 3030-07663 LIQUID FLOW METER TEOS, 4G/MINSTEC INC./ AMAT LF-410A-EVD/ 3030-07663 LIQUID FLOW METER TEOS, 4G/MIN
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APPLIED MATERIALS 3030-07663

Horiba STEC LF-410A-EVD TEOS Liquid Flow Meter

Market Availability & Pricing

Part number3030-07663
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales300 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Vacuum › Gas & Liquid Delivery › Liquid Flow Controllers
Horiba STEC LF-410A-EVD TEOS Liquid Flow Meter
APPLIED MATERIALS3030-07663Liquid flow meter/controller
Product description
Applied Materials 3030-07663 Horiba/STEC LF-410A-EVD liquid flow meter/controller for TEOS, reported 4 g/min.
Specifications and identifiers
identification
Supplier/modelHoriba STEC LF-410A-EVD
Fluid/processTEOS
Reported flow4 g/min
Applications
TEOS deliveryliquid precursor flowgas delivery verificationTEOS liquid precursor deliveryCVD liquid-flow controlLiquid flow meter replacement
How it works

A liquid or gas flow meter/controller used to measure or regulate process-material flow.

Flow range, fluid calibration, fittings, and control mode must match the process chemistry and recipe requirements.

Technical guide
liquid flow meter

instrument for measuring liquid precursor flow

TEOS
tetraethyl orthosilicate, a common CVD precursor
g/min
grams per minute flow unit
What to verify before purchase
  • Confirm whether unit is LFM or LFC configuration
  • Verify calibration fluid/range and fittings
  • Check 1/4 and 1/8 VCR fitting requirements
Confirm with the seller
  • Exact control mode and fitting layout are not fully confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Horiba Stec, LF-410A-EVD, LFC, TEOS, 4.0g/min, AMAT 3030-07663, 451958

Horiba Stec, LF-410A-EVD, LFC, TEOS, 4.0g/min, AMAT 3030-07663, 451958

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 20, 2019 21:24 UTC
End recorded: Dec 7, 2024 07:48 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 451864

STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 451864

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 30, 2019 17:26 UTC
End recorded: Dec 7, 2024 07:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 451863

STEC LF-410A LFC, LF-410A-EVD, TEOS, 4g/min, AMAT 3030-07663, 451863

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 30, 2019 17:22 UTC
End recorded: Dec 7, 2024 07:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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