| Supplier/model | Unit Instruments / Celerity UFM-9660 Repeated supplier/model reference in the evidence. |
|---|---|
| Gas | He / helium Gas calibration noted in multiple titles. |
| Flow range | 6 SLM Supported by repeated title details. |
| Fitting/context | 1/4 VCR metal fitting noted Connection style should be verified on the actual unit. |
| Series | 9000 / 9660 family Supported by supplied wording. |
A mass flow controller meters a controlled flow of process gas.
Gas identity, range, fittings, control interface, and calibration must match the tool recipe and gas panel design.
Common MFC technology that controls gas flow using a calibrated sensor and valve loop.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 20, 2026 16:03 UTC
Availability has not been rechecked; current availability is unknown.
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| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 1 | 250.0000 | 250.0000 | 250.0000000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Sep 9, 2022 00:59 UTC | Unit Instruments UFM-9660, MFC, He, 6L, AMAT 3030-09099, 9000 Series, 452045 | Completed listing price | 250 (currency not captured) | Not established |
| Apr 20, 2022 23:51 UTC | Unit Instruments UFM-9660, MFC, He, 6L, AMAT 3030-09099, 452046 | Completed listing price | 100 (currency not captured) | Not established |
| Aug 13, 2020 13:45 UTC | Applied Materials AMAT 3030-09099 MFM 9660 6SLM HE 14VCR MTL HOV 15PD 1 | Completed listing price | 195.95 (currency not captured) | Not established |
| Sep 19, 2019 22:48 UTC | Applied Materials (AMAT) 3030-09099 MFM 9660 6SLM HE 1/4VCR MTL HOV 15PD 1 | Completed listing price | 450 (currency not captured) | Not established |
| Mar 29, 2018 16:22 UTC | Applied Materials (AMAT) 3030-09099 MFM 9660 6SLM HE 1/4VCR MTL HOV 15PD 1 | Completed listing price | 450 (currency not captured) | Not established |
| Dec 8, 2016 22:45 UTC | AMAT Mass Flow Controller MFC 3030-09099, Gas: HE, Refurbished | Completed listing price | 175 (currency not captured) | Not established |
| Feb 2, 2016 17:10 UTC | MFC UNIT 9000 Applied Materails (AMAT) 3030-09099 MFM,9660,6SLM,HE,1/4VCRMTL Kit | Completed listing price | 382.8 (currency not captured) | Not established |
| Jan 14, 2016 06:55 UTC | AMAT 3030-09099 Unit UFM-9660 6L He 760Torr 800-802-1002 500PSI /3500 kPa MFC | Completed listing price | 400 (currency not captured) | Not established |
| Oct 6, 2014 17:14 UTC | APPLIED MATERIALS (AMAT) MFM96606SLMHE1/4VCRMTL 3030-09099 | Completed listing price | 700 (currency not captured) | Not established |
| Oct 4, 2014 01:23 UTC | APPLIED MATERIALS (AMAT) MFM96606SLMHE1/4VCRMTL 3030-09099 | Completed listing price | 700 (currency not captured) | Not established |
| Sep 3, 2014 22:34 UTC | APPLIED MATERIALS (AMAT) MFM96606SLMHE1/4VCRMTL 3030-09099 | Completed listing price | 700 (currency not captured) | Not established |
| May 29, 2013 20:26 UTC | AMAT 3030-09099 MFM,9660,6SLM,HE,1/4VCRMTL | Completed listing price | 700 (currency not captured) | Not established |
| May 7, 2013 00:58 UTC | Unit Mass Flow Controller 6 SLM He UFM-9660 Control Unit, 3030-09099W | Completed listing price | 50 (currency not captured) | Not established |
| Jan 2, 2013 19:47 UTC | AMAT 3030-09099 CELERITY UFM-9660 6L He | Completed listing price | 95 (currency not captured) | Not established |
| Jan 2, 2013 19:45 UTC | AMAT 3030-09099 CELERITY UFM-9660 6L He. Only used 1 day. | Completed listing price | 225 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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