AMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanAMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanAMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanAMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanAMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanAMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanAMAT 3030-09423 / Unit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraCleanUnit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraClean / 3030-09423 AMATUnit UFC-8165 Mass Flow Controller 400 SCCM Gas AR UltraClean / 3030-09423 AMATAMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423AMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423AMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423AMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423AMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423AMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423AMAT Unit DeviceNet UFC-8165 Mass Flow Controller 400 SCCM Gas AR 3030-09423
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APPLIED MATERIALS 3030-09423

Unit UFC-8165 argon MFC, 400 SCCM

Market Availability & Pricing

Part number3030-09423
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Gas & Fluid › Mass Flow Control › Mass Flow Controllers
Unit UFC-8165 argon MFC, 400 SCCM
APPLIED MATERIALS3030-09423Mass flow controller
Product description
Unit Instruments UFC-8165 DeviceNet mass flow controller, 400 SCCM argon, AMAT 3030-09423.
Specifications and identifiers
supported details
Supplier/modelUnit UFC-8165
Supported by the provided part evidence.
GasAr / argon
Gas calibration is stated in the supplied wording.
Flow range400 SCCM
Supported by all provided source wording.
InterfaceDeviceNet mentioned
Control interface should be verified on the unit.
Equipment context
  • Applied Materials gas panel using Unit UFC-8165
Applications
process gas deliverygas panel serviceMFC replacementArgon process gas deliveryDeviceNet gas panel MFC replacement
How it works

A mass flow controller meters a controlled flow of process gas.

Gas identity, range, fittings, control interface, and calibration must match the tool recipe and gas panel design.

Technical guide
thermal_mass_flow

Common MFC technology that controls gas flow using a calibrated sensor and valve loop.

SCCM
Standard cubic centimeters per minute.
SLM
Standard liters per minute.
VCR
A high-purity metal-gasket fitting style used in semiconductor gas delivery.
What to verify before purchase
  • Verify calibration gas and full-scale range on the label.
  • Confirm DeviceNet address/interface and connector type.
  • Check whether the unit is cleanroom/ultraclean configured.
Confirm with the seller
  • Exact installed tool platform is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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