Product description
Applied Materials 3030-11068 Horiba STEC LF-A40M-A-EVD liquid mass flow meter / flow controller for TEOS, reported 7 g/min and 1/4 female VCR.
Specifications and identifiers
identification
| Supplier/model | Horiba STEC LF-A40M-A-EVD |
|---|
| Fluid/process note | TEOS |
|---|
| Reported range | 7 g/min appears in evidence |
|---|
| Connection note | 1/4 FVCR appears in evidence |
|---|
Applications
vacuum isolationgas box and mass-flow verificationslit/gate valve actuationfacility fluid handlingTEOS liquid precursor flow meteringCVD precursor deliveryLiquid flow control verification
How it works
A valve, regulator, actuator, or gas/fluid control component used to control vacuum, gas, coolant, or pneumatic flow.
Port size, actuation method, pressure rating, leak integrity, and seal material must match the process and safety requirements.
Technical guide
stainless steel
common for vacuum and process gas hardware
mass flow verifier
checks or verifies gas flow delivery
pneumatic actuation
uses air pressure to move a valve or cylinder
- NW/KF
- quick-flange vacuum connection standard
- VCR
- metal gasket face-seal fitting standard
What to verify before purchase
- Verify calibrated fluid/range from label
- Confirm connection style and seal compatibility
- Check calibration status and contamination history
Confirm with the seller
- Exact calibration gas/liquid and range must be verified from the device label
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.