Product description
HORIBA STEC LF-410A-EVD liquid IPA mass flow meter, 2.5 g/min context.
Specifications and identifiers
identification
| Vendor/model | HORIBA STEC LF-410A-EVD Associated liquid flow meter model. |
|---|
| Fluid context | IPA Isopropyl alcohol service context noted. |
|---|
| Flow range | 2.5 g/min Flow value to verify against nameplate. |
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Applications
process chamberstool frameswafer handling hardwaremaintenance and refurbishmentliquid chemical deliveryIPA flow measurement
How it works
A mechanical chamber or tool component provides a specific mounting, shielding, sealing, alignment, or structural function.
Small geometry, material, coating, and revision differences can affect fit, plasma exposure, contamination control, and wafer handling.
Technical guide
- AMAT
- Applied Materials abbreviation.
- ASSY
- Assembly.
- P/N
- Part number.
- PCB
- Printed circuit board.
What to verify before purchase
- Verify exact revision and configuration against the installed tool.
- Inspect condition, cleanliness, connectors, seals, and any included subassemblies.
Confirm with the seller
- Exact tool compatibility beyond the stated part identity is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.