Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArUnit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12072 3L ArCelerity Unit UFC-8165 Mass Flow Controller 1/4 VCR Valve (Ar/3L) MFC 3030-12072
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Applied Materials 3030-12072

UFC-8165 Mass Flow Controller

Market Availability & Pricing

Part number3030-12072
ManufacturerApplied Materials
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Gas Delivery › Flow Control › Mass Flow Controllers
UFC-8165 Mass Flow Controller
Applied Materials3030-12072Mass flow controller
Product description
Unit Instruments / Celerity UFC-8165 mass flow controller, 3L Ar context, 1/4 VCR valve mentioned.
Specifications and identifiers
identified features
Vendor/modelUnit Instruments / Celerity UFC-8165
Item typeMass flow controller
Gas/range context3L Ar
Likely 3 slm argon context; verify calibration label.
Fitting/valve context1/4 VCR valve mentioned
Applications
gas delivery panelsCVD/etch process gas controlcarrier and dopant gas meteringArgon gas flow controlGas panel replacement MFC
How it works

A precision gas-flow device that meters a specified gas at a defined flow range.

Gas type, full-scale flow, fittings, calibration, and communication protocol must match the process recipe and gas panel.

Technical guide
DeviceNet

Industrial fieldbus often used for smart gas-panel devices.

MFC

Mass flow controller.

VCR
Metal gasket face-seal fitting style used in high-purity gas systems.
sccm
Standard cubic centimeters per minute; common gas-flow unit.
What to verify before purchase
  • Verify gas calibration, full-scale flow, fittings, valve configuration, and electrical connector
  • Confirm whether 3L means 3 slm on the actual calibration label
Confirm with the seller
  • Exact calibration date and communication protocol are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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