Product description
Horiba STEC LF-F40M-A-EVD liquid mass-flow controller/meter configured for ATRP at 4 g/min.
Specifications and identifiers
identified features
| Vendor/model | Horiba STEC LF-F40M-A-EVD Vendor/model wording appears repeatedly. |
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| Fluid/application | ATRP Configured fluid/application wording appears in descriptions. |
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| Flow range | 4 g/min Flow rate wording is repeated. |
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Applications
Gas deliveryLiquid precursor deliveryCVD/ALD process controlMass-flow meteringLiquid precursor deliveryCVD/ALD liquid flow meteringChemical delivery panel service
How it works
A flow controller or flow meter used to meter a process gas or liquid precursor in semiconductor equipment.
The configured fluid, full-scale range, fittings, calibration, and communication interface must match the process recipe and gas/liquid panel.
What to verify before purchase
- Confirm fluid configuration and calibration certificate.
- Verify fittings and electrical interface.
- Check whether it is a controller or meter configuration.
Confirm with the seller
- Calibration status and exact communication interface are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.