Product description
Advanced Energy 3152290-000 PMH 13/3000 RF power measurement head / sensor.
Specifications and identifiers
identification
| Model/family | PMH 13/3000 |
|---|
| Function | RF power measurement head / sensor |
|---|
| Related system | GenCal appears in evidence with related part 3152288-000 |
|---|
Applications
wafer presence detectionvacuum and pressure monitoringRF power measurementflow/pressure monitoringRF power measurementGenerator calibration/monitoringRF delivery diagnostics
How it works
A sensor, gauge, or measurement module used to detect wafer presence, pressure, flow, power, or other tool conditions.
Sensor type, calibration, setpoint, output format, and wiring determine whether the tool can safely detect state changes.
Technical guide
ion gauge
vacuum measurement method for low pressures
photoelectric sensing
optical detection of object presence
What to verify before purchase
- Verify frequency/power range and calibration status
- Confirm cable and meter/controller compatibility
- Inspect RF connectors for damage
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.